Role of Ar dilution of SiH<sub>4</sub>/PH<sub>3</sub> gas mixture on PECVD based film growth process, Hydrogen bonding configuration, and Optical Properties of n-type a-Si:H thin films
Publication date: Available online 30 August 2023Source: Chemical PhysicsAuthor(s): Chandra Bhal Singh, Sekhar Bhattacharya, Uday Singh Patel, P. Balaji Bhargav, Nafis Ahmed