Defect detection and classification on semiconductor wafers using two-stage geometric transformation-based data augmentation and SqueezeNet lightweight convolutional neural network

Publication date: Available online 20 August 2023Source: Computers & Industrial EngineeringAuthor(s): Francisco López de la Rosa, José L. Gómez-Sirvent, Rafael Morales, Roberto Sánchez-Reolid, Antonio Fernández-Caballero